Low Power RF Generators

50 Watts to 600 Watts

 

 

The low power (< 600 Watts) range of RF generators are precision units intended for scientific and industrial applications. Their robust construction using the latest in switch mode and solid state design techniques ensure a long and trouble -free life even in harsh environments.

 

There are five generator models in the range:

RFG050

0 to 50 W

RFG100

0 to 100 W

RFG150

0 to 150 W

RFG300

0 to 300 W

RFG600

0 to 600 W

 

The main features of all models are:

The output power of each generator is fully adjustable between zero and maximum power. The feedback control system ensures that the set output power remains constant and repeatable. Incident (forward) and reflected power measurements are internally calibrated to give high accuracy throughout the power range.

 

An external voltage of 0 to 5Volts can be used to control the output. This is particularly useful in sputter coating applications where the d.c. voltage developed across the plasma dark space can be controlled rather than the RF power.

 

The design of the generator is modular with separate RF driver, switch mode power supply and RF power amplifier . These units are easily removed from the chassis in the unlikely event that a replacement becomes necessary.

 

(30.01.2001)

General Specifications - Low Power RF Generators

 

Model RFG050 / Model RFG100 / Model RFG150 / Model RFG300 / Model RFG600

 

Output frequency

13.56MHz or 27.12MHz. crystal controlled or common exciter/external signal source input (BNC on rear panel.)

Consult factory for other frequencies

Output power

RFG050 - 50Watts

RFG100 - 100Watts

RFG150 - 150Watts

RFG300 - 300Watts

RFG600 - 600Watts

Frequency stability

Crystal controlled:

13.56MHz +/-1.4kHz

27.12MHz +/-2.7kHz

Output impedance

50Ω

Output connection

N type/50Ω

Power control

Analogue control system allows power or external feedback control. Output stability +/-l% for +/-15% variation in line.

Meters

3 1/2 digit LED display of incident (forward) and reflected power.

VSWR capability

Can withstand any VSWR at any phase angle

Harmonic output

Better than 40dB below fundamental

Common exciter

BNC input 50Ω (max 13 dBm)

Output envelope ripple

Less than 1% of full amplitude

Pulse operation

BNC TTL input on rear panel.

Minimum pulse width 10μs. The external power control signal should vary the peak output from 0% to 100%, with a pulse-on duty cycle from zero to continuous DC (100% duty cycle.)

Front panel power meters automatically display pulse output levels by utilising sample/hold technology

Front panel controls

RF on

RF off

Output power set

Front panel indicator

RF power on

RF power off

Reflected power exceed limit

Remote operation

Cooling interlock

External interlock

Rear panel switches/connectors

Remote connector (15way ‘D’)

Common exciter output (TNC)

Common exciter input/external

signal source (BNC) (max 13dBm)

Common exciter/external signal switch

Pulse/CW switch

Pulse input connector (BNC)

Line input (I.E.C.)

RF output connector (N50Ω )

Remote control

Accessed via rear panel 15 way

‘D' type socket indicators:

RF on/off (open collector 100mA)

Incident power

Reflected power

BNC output 50( 7dBm

RF on/off (contact closure)

Interlock (contact closure)

Output set 0-5Volts = 0-100%

Remote output set request

External feedback

Remote RF on/off request

Cooling

Forced air - air intake around chassis cover, exhaust through rear

Line

110/230 VAC single phase 50/60Hz

Size

1/2 rack mounting 4U high 550mm deep (external connectors may protrude an extra 50mm)

Weight

18kg

Finish

Front Panel -RAL7135 light grey

Rear Panel - Chromated Aluminium

Cover - Passivated Steel

Environment

Operating temperature:

0-35°C (-20 to +65°C storage)

Standards

Safety: IEC 215

Emissions:

EN 50081-2

Immunity:

EN 50082-2

(30.01.2001)

 

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