
Low Power RF Generators
50 Watts to 600 Watts

There are five generator models in the range:
|
RFG050 |
0 to 50 W |
|
RFG100 |
0 to 100 W |
|
RFG150 |
0 to 150 W |
|
RFG300 |
0 to 300 W |
|
RFG600 |
0 to 600 W |
The main features of all models are:
Proven design and track record
½ rack ,4U (177mm) high
Individual LED displays for incident (forward) and reflected power.
Precision power control +/- 1% of set point.
Common exciter input/output
Fast pulse operation from TTL/CMOS input.
13.56MHz and 27.12MHz frequencies available as standard.Non standard frequencies available - Contact factory for details.
The output power of each generator is fully adjustable between zero and maximum power. The feedback control system ensures that the set output power remains constant and repeatable. Incident (forward) and reflected power measurements are internally calibrated to give high accuracy throughout the power range.
An external voltage of 0 to 5Volts can be used to control the output. This is particularly useful in sputter coating applications where the d.c. voltage developed across the plasma dark space can be controlled rather than the RF power.
The design of the generator is modular with separate RF driver, switch mode power supply and RF power amplifier . These units are easily removed from the chassis
in the unlikely event that a replacement becomes necessary.
(30.01.2001
)General Specifications - Low Power RF Generators
Model RFG050 / Model RFG100 / Model RFG150 / Model RFG300
/ Model RFG600
Output frequency
13.56MHz or 27.12MHz. crystal controlled or common exciter/external signal source input (BNC on rear panel.)
Consult factory for other frequencies
Output power
RFG050 - 50Watts
RFG100 - 100Watts
RFG150 - 150Watts
RFG300 - 300Watts
RFG600 - 600Watts
Frequency stability
Crystal controlled:
13.56MHz +/-1.4kHz
27.12MHz +/-2.7kHz
Output impedance
Ω50
Output connection
N type/50Ω
Power control
Analogue control system allows power or external feedback control. Output stability +/-l% for +/-15% variation in line.
Meters
3 1/2 digit LED display of incident (forward) and reflected power.
VSWR capability
Can withstand any VSWR at any phase angle
Harmonic output
Better than 40dB below fundamental
Common exciter
BNC input 50Ω (max 13 dBm)
Output envelope ripple
Less than 1% of full amplitude
Pulse operation
BNC TTL input on rear panel.
Minimum pulse width 10μs. The external power control signal should vary the peak output from 0% to 100%, with a pulse-on duty cycle from zero to continuous DC (100% duty cycle.)
Front panel power
meters automatically display pulse output levels by utilising sample/hold technologyFront panel controls
RF on
RF off
Output power set
Front panel indicator
RF power on
RF power off
Reflected power exceed limit
Remote operation
Cooling interlock
External interlock
Rear panel switches/connectors
Remote connector (15way ‘D’)
Common exciter output (TNC)
Common exciter input/external
signal source (BNC) (max 13dBm)
Common exciter/external signal switch
Pulse/CW switch
Pulse input connector (BNC)
Line input (I.E.C.)
RF output connector (N50Ω )
Remote control
Accessed via rear panel 15 way
‘D' type socket indicators:
RF on/off (open collector 100mA)
Incident power
Reflected power
BNC output 50( 7dBm
RF on/off (contact closure)
Interlock (contact closure)
Output set 0-5Volts = 0-100%
Remote output set request
External feedback
Remote RF on/off request
Cooling
Forced air - air intake around chassis cover, exhaust through rear
Line
110/230 VAC single phase 50/60Hz
Size
1/2 rack mounting 4U high 550mm deep (external connectors may protrude an extra 50mm)
Weight
18kg
Finish
Front Panel -RAL7135 light grey
Rear Panel - Chromated Aluminium
Cover - Passivated Steel
Environment
Operating temperature:
0-35°C (-20 to +65°C storage)
Standards
Safety: IEC 215
Emissions:
EN 50081-2
Immunity:
EN 50082-2
(30.01.2001)
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