RF Generator: RFG1K5 - 1500-Watt Air-Cooled
Tel: +44 (0) 1323 639974
Fax: +44 (0) 1323 739654
Product Description for RFG1K5
The RFG1K5, 1500-Watt output RF generator is a precision unit intended for both scientific and industrial applications. The robust construction, using the latest in switch mode and solid state design techniques, ensure a long and trouble -free life even in harsh environments.
It is recommended that the generator be used in conjunction with either a manual or automatic impedance matching network. Both types are available from Coaxial Power Systems Ltd - please see the separate brochure for details.
The main features of all models are:
- Proven design and track record
- 19" rack, 4U (177mm) high
- Individual LED displays for incident (forward) and reflected power.
- Precision power control +/- 1% of set point.
- Common exciter input/output
- Fast pulse operation from TTL/CMOS input
- 13.56MHz and 27.12MHz frequencies available as standard. Non-standard frequencies are available - please contact factory for details.
- Air cooled
The output power of the generator is fully adjustable between zero and maximum power. The feedback control system ensures that the set output power remains constant and repeatable. Incident (forward) and reflected power measurements are internally calibrated to give high accuracy throughout the power range.
An external voltage of 0 to 5Volts can be used to control the output. This is particularly useful in sputter coating applications where the D.C. voltage developed across the plasma dark space can be controlled rather than the RF power.
The design of the generator is modular with separate RF driver; switch mode power supplies and RF power amplifiers. These units are easily removed from the chassis in the unlikely event that a replacement becomes necessary.
