RF Generator: RFG 150
High Efficiency RF Generator
Model RFG150-13, 150 Watts at 13.56MHz
Model RFG150-27, 150Watts at 27.12MHz
Product Description for RFG 150
The high efficiency range of RF generators are precision units intended for scientific and industrial applications. Their robust construction using the latest in switch mode and solid-state design techniques ensure a long and trouble free life even in harsh environments.
The small size of the unit makes it ideal for use where there is restricted rack space. It is recommended that the generator be used in conjunction with either a manual or automatic impedance matching network. Both types are available from Coaxial Power Systems Ltd - please see the separate brochure for details.
The main features of all models are:
- Efficient Class-E design
- Half-rack, 2U (89mm) high
- Microprocessor display of incident (forward) power, reflected power and unit status
- Precision power control +/- 1% of set point.
- Fast pulse operation from TTL/CMOS input.
- 13.56MHz and 27.12MHz frequencies as standard
The output power of each generator is fully adjustable between zero and maximum power. The feedback control system ensures that the set output power remains constant and repeatable. Incident (forward) and reflected power measurements are internally calibrated to give high accuracy throughout the power range.
An external voltage of 0 to 5Volts can be used to control the output. This is particularly useful in sputter coating applications where the d.c. voltage developed across the plasma dark space can be controlled rather than the RF power.